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ASTM E2734/E2734M-10(2018)

ASTM E2734/E2734M-10(2018)

Standard Specification for Dimensions of Knife-Edge Flanges

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1.1 ,This standard specifies the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 105 Pa to 10-11 Pa. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum.

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