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Home>ASTM E2244-11(2018)

ASTM E2244-11(2018)

ASTM E2244-11(2018)

Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer

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1.1 ,This test method covers a procedure for measuring in-plane lengths (including deflections) of patterned thin films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer, also called an interferometric microscope.

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