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Home>ASTM D5544-16

ASTM D5544-16

ASTM D5544-16

Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water

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1.1 ,This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, and related industries. This material is referred to as residue after evaporation (RAE). The range of the test method is from 0.001 μ,g/L (ppb) to 60 μ,g/L (ppb).

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